【英文标准名称】:StandardGuideforMetallurgicalAnalysisforGasDistributionSystemComponents
【原文标准名称】:气体分配系统元部件的金相分析
【标准号】:ASTMF1376-1992(2005)
【标准状态】:现行
【国别】:
【发布日期】:1992
【实施或试行日期】:
【发布单位】:美国材料与试验协会(US-ASTM)
【起草单位】:F01.10
【标准类型】:(Guide)
【标准水平】:()
【中文主题词】:试验;气体分配;燃气配件
【英文主题词】:Chromiumalloys;Corrosionresistantmetallicalloys;Corrosiveserviceapplications;Gasdistributionsystems;Metallurgy;Molybdenum-electronicapplications;Nickelalloys;Semiconductorcleanrooms;Stainlesssteel-gasdistributionsystems;
【摘要】:Thisguidedefinesaprocedurefortestingcomponentsbeingconsideredforinstallationintoahigh-puritygasdistributionsystem.Applicationofthisguideisexpectedtoyieldcomparabledataamongcomponentstestedforpurposesofqualificationforthisinstallation.Thisguideestablishesaprocedurefordeterminingtheelementalcompositionandmetallurgicalcharacteristicsofmetalusedtofabricatecomponentsforhighpuritygasdistributionsystemsinthesemiconductorindustry.Thecompositionandmetallurgyofstainlesssteelmaybeexpectedtoaffectpropertiesofimportancetothisapplication,includingsurfaceroughness,incidenceofsurfacedefects,passivation,corrosionresistance,andwelding.1.1Thisguidecoverscorrosionresistantmetallicalloysofthegeneralclassstainlesssteel,containingchromium,nickel,manganese,andsiliconasmajoralloyingadditionsandpossiblymolybdenum,thatarequalifiedorspecifiedforthematerialsofcomponentsusedinhigh-puritygassupplysystemsforthesemiconductorindustry.Thisguideisprimarilyintendedfortestingtodetermineconformancetoapplicablecompositionandmetallurgicalspecificationsasstatedinsupplierproductspecificationsorcustomerpurchasespecifications,orboth.1.2Elementsanalyzedandreportedinthisguideareasfollows:1.2.1Thealloyingadditionschromium,nickel,andmolybdenum(ifspecifiedinalloy,asintype316L),1.2.2Theminorelementsandresidualsmanganese,silicon,copper,cobalt,andstabilizerssuchastitaniumandcolumbium(niobium),ifpresent,1.2.3Carbon,sulfurandphosphorus,1.2.4Nitrogenandoxygengases,1.2.5Anyadditionalminorelementadditionsthatmaybemadeaspartofthemeltingandcastingpractice,suchasaluminumandcalcium,and1.2.6Availablestandardanalyticalandreportingtechniquesaredescribedfortheseelements.1.3Metallurgicalcharacteristicstobeanalyzedandreportedareinclusioncontents,grainstructure,mechanicalproperties,andintergranularcorrosionsusceptibility.1.4Limitations:1.4.1ThisguideislimitedtocorrosionresistantmetalalloysofthegeneralclassstatedintheScope.1.4.2Thetestmethodscitedinthisguidearenotintendedtoprecludetheuseofothergenerallyacceptedtechniquesofdemonstratedequivalentorsuperiorprecisionandbias.1.4.3Inclusionoftestingandanalysisproceduresforanygivenelementormetallurgicalcharacteristicinthisguideisnottobeconstruedasbeingarequirementforincorporationofthatelementormetallurgicalcharacteristicintoanyspecifications.1.5ThevaluesstatedinSIunitsaretoberegardedasthestandard.Theinch-poundunitsgiveninparenthesesareforinformationonly.1.6Thisstandarddoesnotpurporttoaddressallofthesafetyproblems,ifany,associatedwithitsuse.Itistheresponsibilityoftheuserofthisstandardtoestablishappropriatesafetyandhealthpracticesanddeterminetheapplicabilityofregulatorylimitationspriortouse.
【中国标准分类号】:Q82
【国际标准分类号】:77_040_01;91_140_65
【页数】:4P.;A4
【正文语种】: